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TLC372QDRG4

TLC372QDRG4资料
TLC372QDRG4
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Manufacturer:TI
Description:  The Motorola accelerometer is a surface-microma- chined integrated-circuit accelerometer.   The device consists of a surface micromachined ca- pacitive sensing cell (g-cell) and a signal conditioning ASIC contained in a single integrated circuit package. The sensing element is sealed hermetically at the wafer level using a bulk micromachined cap wafer.   The g-cell is a mechanical structure formed from semi- conductor materials (polysilicon) using semiconductor processes (masking and etching). It can be modeled as a set of beams attached to a movable central mass that move between fixed beams. The movable beams can be deflected from their rest position by subjecting the sys- tem to an acceleration (Figure 2).   As the beams attached to the central mass move, the distance from them to the fixed beams on one side will in- crease by the same amount that the distance to the fixed beams on the other side decreases. The change in dis- tance is a measure of acceleration.
 
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型 号:TLC372QDRG4
厂 家:TI
封 装:
批 号:07+
数 量:48709
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